Akinori Ebe
3Patents
1Active
3Granted
27Portfolio score
Filing activity: Dec 12, 2003 → Jul 14, 2010 · 2 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7785441B2 | Plasma generator, plasma control method, and method of producing substrate | Electricity | 4 | Expired |
| US8444806B2 | Plasma generator, plasma control method and method of producing substrate | Electricity | 2 | Active |
| US8419894B2 | Plasma generator, plasma control method and method of producing substrate | General | 0 | Revoked |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.