Patent assignee · CA · COMPANY

Alberta Microelectronic Centre

1Patents
0Active
1Granted
27Portfolio score

Filing activity: Jun 19, 1995 → Jun 19, 1995

Most-cited patents

PatentTitleAreaCited byStatus
US5573679A Fabrication of a surface micromachined capacitive microphone using a dry-etch process Performing Operations; Transporting 97 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.