Applied Materails Inc.
1Patents
0Active
1Granted
21Portfolio score
Filing activity: May 18, 2001 → May 18, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6673636B2 | Method of real-time plasma charging voltage measurement on powered electrode with electrostatic chuck in plasma process chambers | Electricity | 5 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.