Patent assignee · US · COMPANY

Applied Materails Inc.

1Patents
0Active
1Granted
21Portfolio score

Filing activity: May 18, 2001 → May 18, 2001

Most-cited patents

PatentTitleAreaCited byStatus
US6673636B2 Method of real-time plasma charging voltage measurement on powered electrode with electrostatic chuck in plasma process chambers Electricity 5 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.