Patent assignee · NL · COMPANY

ASML Masktooks B.V.

2Patents
1Active
2Granted
35Portfolio score

Filing activity: Nov 5, 2004 → Apr 12, 2006 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7398508B2 Eigen decomposition based OPC model Physics 19 Expired
US7681171B2 Method, program product and apparatus for performing double exposure lithography Physics 8 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.