Patent assignee · DE · INDIVIDUAL

Car Zeiss

1Patents
0Active
1Granted
23Portfolio score

Filing activity: Feb 20, 2002 → Feb 20, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US6717722B2 Catadioptric optical system and exposure apparatus having the same Physics 6 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.