Cymer Laser Technologies
18Patents
0Active
18Granted
32Portfolio score
Filing activity: Jan 15, 1988 → Jan 25, 1996
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5025445A | System for, and method of, regulating the wavelength of a light beam | Electricity | 230 | Expired |
| US4959840A | Compact excimer laser including an electrode mounted in insulating relationship to wall of the laser | Electricity | 162 | Expired |
| US5095492A | Spectral narrowing technique | Electricity | 116 | Expired |
| US5023884A | Compact excimer laser | Electricity | 113 | Expired |
| US5359620A | Apparatus for, and method of, maintaining a clean window in a laser | Electricity | 107 | Expired |
| US5450207A | Method and apparatus for calibrating a laser wavelength control mechanism | Physics | 84 | Expired |
| US5440578A | Gas replenishment method and apparatus for excimer lasers | Electricity | 80 | Expired |
| US5586134A | Excimer laser | Electricity | 64 | Expired |
| US5337330A | Pre-ionizer for a laser | Electricity | 54 | Expired |
| US5377215A | Excimer laser | Electricity | 51 | Expired |
| US5420877A | Temperature compensation method and apparatus for wave meters and tunable lasers controlled thereby | Electricity | 44 | Expired |
| US5048041A | Compact excimer laser | Electricity | 25 | Expired |
| US5596590A | Beam diverting shutter for a laser beam | Physics | 15 | Expired |
| US5029177A | Compact excimer laser | Electricity | 14 | Expired |
| US5027366A | Compact excimer laser | Electricity | 10 | Expired |
| US5018161A | Compact excimer laser | Electricity | 10 | Expired |
| US5033055A | Compact excimer laser | Electricity | 9 | Expired |
| US5018162A | Compact excimer laser | Electricity | 8 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.