GaSonics, Inc.
2Patents
0Active
2Granted
28Portfolio score
Filing activity: Sep 28, 1990 → Jul 11, 1994
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5167716A | Method and apparatus for batch processing a semiconductor wafer | Electricity | 584 | Expired |
| US5467424A | Apparatus and method for generating steam | Mechanical Engineering; Lighting; Heating | 12 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.