Patent assignee · US · COMPANY

Gray Scale Technologies, Inc.

2Patents
0Active
2Granted
25Portfolio score

Filing activity: Mar 26, 1999 → Mar 12, 2001

Most-cited patents

PatentTitleAreaCited byStatus
US6534221B2 Method for fabricating continuous space variant attenuating lithography mask for fabrication of devices with three-dimensional structures and microelectronics Physics 20 Expired
US6524755B2 Phase-shift masks and methods of fabrication Emerging Cross-Sectional Technologies 14 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.