Microtherm LLC
3Patents
0Active
3Granted
28Portfolio score
Filing activity: May 25, 1984 → May 18, 2000
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5909276A | Optical inspection module and method for detecting particles and defects on substrates in integrated process tools | Electricity | 113 | Expired |
| US6409090B1 | Self-optimizing device for controlling a heating system | Physics | 13 | Expired |
| US4539545A | Thermal switch | Electricity | 7 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.