Patent assignee · US · COMPANY

MKS TECHNOLOGY

9Patents
9Active
9Granted
46Portfolio score

Filing activity: Jun 15, 2011 → Nov 12, 2019

Most-cited patents

PatentTitleAreaCited byStatus
US8867033B2 Spectrometer Physics 34 Active
US10072984B2 Spectrometer Physics 7 Active
US9523610B2 Spectrometer Physics 7 Active
US9459146B2 Spectrometer Physics 7 Active
US8988678B2 Spectrometer Physics 7 Active
US9791313B2 Spectrometer Physics 7 Active
US11307090B2 Spectrometer Physics 0 Active
US10473522B2 Spectrometer Physics 0 Active
US10458917B2 Method of measuring Raman scattering and related spectrometers and laser sources Physics 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.