Patent assignee · US · COMPANY

Monarch Technologies Corporation

1Patents
0Active
1Granted
26Portfolio score

Filing activity: Mar 12, 1987 → Mar 12, 1987

Most-cited patents

PatentTitleAreaCited byStatus
US4768291A Apparatus for dry processing a semiconductor wafer Electricity 61 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.