PlasmaSi, Inc.
2Patents
2Active
2Granted
45Portfolio score
Filing activity: Jul 8, 2010 → Jan 10, 2012
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8697197B2 | Methods for plasma processing | Electricity | 29 | Active |
| US8765232B2 | Apparatus and method for dielectric deposition | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.