Patent assignee · US · COMPANY

Rudolph Technology, Inc.

1Patents
1Active
1Granted
39Portfolio score

Filing activity: Jan 22, 2007 → Jan 22, 2007 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US7321108B2 Dynamic focusing method and apparatus Physics 1 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.