Patent assignee · JP · COMPANY

Semiconductor Process Co., Ltd.

1Patents
0Active
1Granted
24Portfolio score

Filing activity: Apr 4, 1995 → Apr 4, 1995

Most-cited patents

PatentTitleAreaCited byStatus
US5858100A Substrate holder and reaction apparatus Chemistry; Metallurgy 48 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.