Semitool Thermal
1Patents
0Active
1Granted
23Portfolio score
Filing activity: Jan 27, 1997 → Jan 27, 1997
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5895596A | Model based temperature controller for semiconductor thermal processors | Physics | 42 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.