Patent assignee · US · COMPANY

Sensor Control, Inc.

1Patents
0Active
1Granted
20Portfolio score

Filing activity: Sep 10, 1987 → Sep 10, 1987

Most-cited patents

PatentTitleAreaCited byStatus
US4823291A Radiometric measurement of wafer temperatures during deposition Physics 15 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.