Patent assignee · US · COMPANY

Steag Cutek Systems, Inc.

1Patents
0Active
1Granted
23Portfolio score

Filing activity: Jan 17, 2001 → Jan 17, 2001

Most-cited patents

PatentTitleAreaCited byStatus
US6402592B1 Electrochemical methods for polishing copper films on semiconductor substrates Emerging Cross-Sectional Technologies 6 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.