Patent assignee · US · COMPANY

SUG Lithography Systems, Inc.

1Patents
0Active
1Granted
20Portfolio score

Filing activity: Apr 19, 1993 → Apr 19, 1993

Most-cited patents

PatentTitleAreaCited byStatus
US5352962A Brushless polyphase reduced force variation motor Electricity 14 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.