Wafer Tech
1Patents
0Active
1Granted
22Portfolio score
Filing activity: Jul 12, 2001 → Jul 12, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6459491B1 | Non-intrusive pellicle height measurement system | Physics | 17 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.