Inventor · Palo Alto, CA, US

Adam E. Norton

51Patents
12h-index
47Co-inventors
84Inventor score

Filing activity: Mar 28, 1994 → Oct 18, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US5486701A Method and apparatus for measuring reflectance in two wavelength bands to enable determination of thin film thickness Physics 317 Expired
US5859424A Apodizing filter system useful for reducing spot size in optical measurements and other applications Physics 257 Expired
US5747813A Broadband microspectro-reflectometer Physics 162 Expired
US5917594A Spectroscopic measurement system using an off-axis spherical mirror and refractive elements Physics 106 Expired
US6184984A System for measuring polarimetric spectrum and other properties of a sample Physics 87 Expired
US6611330B2 System for measuring polarimetric spectrum and other properties of a sample Physics 83 Expired
US6753961B1 Spectroscopic ellipsometer without rotating components Physics 72 Expired
US6323946A Spectroscopic measurement system using curved mirror Physics 28 Expired
US8233148B2 Hyperspectral imaging systems Physics 28 Active
US6778273B2 Polarimetric scatterometer for critical dimension measurements of periodic structures Physics 27 Expired
US7304735B2 Broadband wavelength selective filter Physics 21 Expired
US7145654B2 Method and apparatus to reduce spotsize in an optical metrology instrument Physics 20 Expired
US6677602B1 Notch and flat sensor for wafer alignment Physics 12 Expired
US9915823B1 Lightguide optical combiner for head wearable display Physics 12 Active
US6583877B2 Spectroscopic measurement system using an off-axis spherical mirror and refractive elements Physics 10 Expired
US7081957B2 Aperture to reduce sensitivity to sample tilt in small spotsize reflectometers Physics 9 Expired
US7660696B1 Apparatus for auto focusing a workpiece using two or more focus parameters Physics 8 Active
US7289219B2 Polarimetric scatterometry methods for critical dimension measurements of periodic structures Physics 8 Expired
US7961306B2 Optimizing sensitivity of optical metrology measurements Physics 8 Active
US6667805B2 Small-spot spectrometry instrument with reduced polarization Physics 7 Expired
US6909507B2 Polarimetric scatterometry methods for critical dimension measurements of periodic structures Physics 7 Expired
US8917459B2 Ergonomic vertical vision redirection Physics 6 Active
US9626145B1 Tileable display with pixel-tape Physics 6 Active
US9336729B2 Optical configurations in a tileable display apparatus Physics 5 Active
US7099081B2 Small-spot spectrometry instrument with reduced polarization and multiple-element depolarizer therefor Physics 5 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.