Inventor · Kawasaki, JP

Akira Tabuchi

1Patents
1h-index
11Co-inventors
29Inventor score

Filing activity: Mar 17, 1987 → Mar 17, 1987

Most-cited inventions

PatentTitleAreaCited byStatus
US4804560A Method of selectively depositing tungsten upon a semiconductor substrate Electricity 100 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.