Inventor · Gloucester, MA, US

Alan Sheng

2Patents
1h-index
2Co-inventors
27Inventor score

Filing activity: Dec 8, 2003 → Dec 8, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US6995381B2 System and method for multi-wafer scanning in ion implanters Electricity 3 Expired
US7019315B2 System and method for serial ion implanting productivity enhancements Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.