Inventor · Sunnyvale, CA, US

Be Van Vo

2Patents
2h-index
11Co-inventors
34Inventor score

Filing activity: Dec 14, 1998 → Jun 13, 2000

Most-cited inventions

PatentTitleAreaCited byStatus
US6364954B2 High temperature chemical vapor deposition chamber Chemistry; Metallurgy 275 Expired
US6603269B1 Resonant chamber applicator for remote plasma source Electricity 238 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.