Benjamin Shulman
3Patents
3h-index
5Co-inventors
39Inventor score
Filing activity: Jun 29, 1995 → Sep 3, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6045433A | Apparatus for optical inspection of wafers during polishing | Electricity | 66 | Expired |
| US6964276B2 | Wafer monitoring system | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6368182B2 | Apparatus for optical inspection of wafers during polishing | Electricity | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.