Boris Simkin
3Patents
3h-index
7Co-inventors
36Inventor score
Filing activity: May 14, 2003 → Aug 24, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6928628B2 | Use of overlay diagnostics for enhanced automatic process control | Physics | 75 | Expired |
| US7310789B2 | Use of overlay diagnostics for enhanced automatic process control | Physics | 14 | Active |
| US7111256B2 | Use of overlay diagnostics for enhanced automatic process control | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.