Inventor · Hsinchu, TW

Chin-Fa Tu

2Patents
1h-index
5Co-inventors
30Inventor score

Filing activity: Feb 23, 2017 → Jan 7, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US10176967B2 Load lock system for charged particle beam imaging Electricity 1 Active
US10643818B2 Load lock system for charged particle beam imaging Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.