David A. Hansen
9Patents
6h-index
5Co-inventors
56Inventor score
Filing activity: May 12, 2000 → Feb 18, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6506105B1 | System and method for pneumatic diaphragm CMP head having separate retaining ring and multi-region wafer pressure control | Performing Operations; Transporting | 61 | Expired |
| US6558232B1 | System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control | Performing Operations; Transporting | 51 | Expired |
| US6623343B2 | System and method for CMP head having multi-pressure annular zone subcarrier material removal control | Performing Operations; Transporting | 28 | Expired |
| US6431093B1 | Truck catwalk system | Performing Operations; Transporting | 22 | Expired |
| US6598704B2 | Truck catwalk system | Performing Operations; Transporting | 16 | Expired |
| US6527625B1 | Chemical mechanical polishing apparatus and method having a soft backed polishing head | Performing Operations; Transporting | 10 | Expired |
| US6966822B2 | System and method for CMP having multi-pressure zone loading for improved edge and annular zone material removal control | Performing Operations; Transporting | 6 | Expired |
| US6641461B2 | Chemical mechanical polishing apparatus having edge, center and annular zone control of material removal | Performing Operations; Transporting | 2 | Expired |
| US12370497B2 | Filtration system for cell removal systems and methods of using the same | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.