David P. Mattson
2Patents
2h-index
5Co-inventors
27Inventor score
Filing activity: Jun 3, 2004 → Jun 3, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7198694B2 | Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems | Electricity | 6 | Expired |
| US7313462B2 | Integrated tool with automated calibration system and interchangeable wet processing components for processing microfeature workpieces | Electricity | 4 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.