Fan Ming
2Patents
1h-index
6Co-inventors
33Inventor score
Filing activity: Dec 16, 2009 → Jan 3, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8363150B2 | Lens control apparatus | Physics | 7 | Active |
| US9146193B2 | Scatterometry metrology methods and methods of modeling formation of a vertical region of a multilayer semiconductor substrate to comprise a scatterometry target | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.