Inventor · Tama, JP

Hideaki Fududa

1Patents
1h-index
2Co-inventors
22Inventor score

Filing activity: Jan 18, 2001 → Jan 18, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US6736147B2 Semiconductor-processing device provided with a remote plasma source for self-cleaning Electricity 118 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.