Inventor · Yokkaichi, JP

Hisaki Kozaki

2Patents
2h-index
4Co-inventors
30Inventor score

Filing activity: Apr 4, 2007 → Jul 8, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US7573066B2 Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus Electricity 58 Active
US7973281B2 Semiconductor substrate, substrate inspection method, semiconductor device manufacturing method, and inspection apparatus Electricity 58 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.