Inventor · Seoul, KR

Ho Chang

3Patents
3h-index
8Co-inventors
43Inventor score

Filing activity: Jul 26, 1995 → Nov 28, 2005

Most-cited inventions

PatentTitleAreaCited byStatus
US5715851A Wafer cassette and cleaning system adopting the same Emerging Cross-Sectional Technologies 18 Expired
US6884297B2 Thin film deposition reactor Chemistry; Metallurgy 15 Expired
US7842606B2 Method of depositing thin film and method of manufacturing semiconductor using the same Emerging Cross-Sectional Technologies 10 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.