Inventor · Seongnam-si, KR

JungHwan Um

3Patents
1h-index
14Co-inventors
34Inventor score

Filing activity: Sep 2, 2016 → Nov 7, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US10672629B2 Ring assembly and chuck assembly having the same Electricity 5 Active
US10892142B2 System for fabricating a semiconductor device Electricity 0 Active
US10312059B2 Ring member with air holes and substrate processing system including the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.