Inventor · Yokohama, JP

Junichi Tuchida

1Patents
1h-index
1Co-inventors
22Inventor score

Filing activity: Jun 14, 1991 → Jun 14, 1991

Most-cited inventions

PatentTitleAreaCited byStatus
US5259407A Surface treatment method and apparatus for a semiconductor wafer Emerging Cross-Sectional Technologies 53 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.