Junichiro Higashi
1Patents
1h-index
1Co-inventors
22Inventor score
Filing activity: Jul 19, 1996 → Jul 19, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6002262A | Method of and apparatus for measuring flatness of semiconductor wafers that have not been subjected to donor-killer treatment | Electricity | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.