Inventor · Osaka, JP

Kousaka Yano

1Patents
1h-index
3Co-inventors
25Inventor score

Filing activity: Jul 7, 1997 → Jul 7, 1997

Most-cited inventions

PatentTitleAreaCited byStatus
US5950101A Method for manufacturing a semiconductor device involving forming two silicon oxide layers by CVD and forming HMDS between the silicon oxide layers Electricity 16 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.