Lawrence C. Lane
3Patents
3h-index
6Co-inventors
36Inventor score
Filing activity: Jun 7, 1995 → Dec 31, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5882417A | Apparatus for preventing deposition on frontside peripheral region and edge of wafer in chemical vapor deposition apparatus | Electricity | 66 | Expired |
| US5843233A | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Electricity | 44 | Expired |
| US5769951A | Exclusion guard and gas-based substrate protection for chemical vapor deposition apparatus | Electricity | 36 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.