Leyi Tu
5Patents
1h-index
9Co-inventors
33Inventor score
Filing activity: Aug 12, 2019 → Dec 17, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11545342B2 | Plasma processor and processing method | Electricity | 1 | Active |
| US12087548B2 | Plasma reactor | Electricity | 0 | Active |
| US11682541B2 | Radio frequency power supply system, plasma processor, and frequency-tuning matching | Electricity | 0 | Active |
| US11626314B2 | Lift pin assembly, an electrostatic chuck and a processing apparatus where the electrostatic chuck is located | Electricity | 0 | Active |
| US11875970B2 | Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.