Manuel Giollo
4Patents
0h-index
13Co-inventors
31Inventor score
Filing activity: Sep 28, 2017 → Jan 24, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11327407B2 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Physics | 0 | Active |
| US10877381B2 | Methods of determining corrections for a patterning process | Physics | 0 | Active |
| US11592753B2 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Physics | 0 | Active |
| US11782349B2 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.