Mark Burgholzer
1Patents
1h-index
4Co-inventors
25Inventor score
Filing activity: Oct 4, 2004 → Oct 4, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7338907B2 | Selective etching processes of silicon nitride and indium oxide thin films for FeRAM device applications | Electricity | 27 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.