Inventor · Espoo, FI

Markku Leskelä

90Patents
16h-index
59Co-inventors
87Inventor score

Filing activity: Jul 16, 1992 → May 17, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10319588B2 Method for depositing a metal chalcogenide on a substrate by cyclical deposition Electricity 398 Active
US9223203B2 Microcontact printed films as an activation layer for selective atomic layer deposition Chemistry; Metallurgy 322 Active
US10731249B2 Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus Electricity 266 Active
US6632279B1 Method for growing thin oxide films Chemistry; Metallurgy 260 Expired
US6416577B1 Method for coating inner surfaces of equipment Emerging Cross-Sectional Technologies 260 Expired
US6706115B2 Method for preparing metal nitride thin films Electricity 100 Expired
US6858546B2 Method of depositing rare earth oxide thin films Chemistry; Metallurgy 87 Expired
US6824816B2 Process for producing metal thin films by ALD Electricity 87 Expired
US7108747B1 Method for growing oxide thin films containing barium and strontium Chemistry; Metallurgy 50 Expired
US7498272B2 Method of depositing rare earth oxide thin films Chemistry; Metallurgy 46 Active
US6436232B1 Procedure for adding a filler into a pulp based on cellulose fibers Textiles; Paper 36 Expired
US6436238B1 Process for preparing a paper web Emerging Cross-Sectional Technologies 31 Expired
US7220451B2 Process for producing metal thin films by ALD Electricity 27 Expired
US6251222A Filler for use in paper manufacture and procedure for producing a filler Textiles; Paper 25 Expired
US6391154B1 Paper web and a method for the production thereof Textiles; Paper 19 Expired
US6599391B2 Filler for use in paper manufacture and procedure for producing a filler Textiles; Paper 18 Expired
US9315896B2 Synthesis and use of precursors for ALD of group VA element containing thin films Electricity 14 Active
US6406592B2 Process for preparing base paper for fine paper Textiles; Paper 14 Expired
US11047042B2 Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films Physics 9 Active
US10358407B2 Synthesis and use of precursors for vapor deposition of tungsten containing thin films Chemistry; Metallurgy 9 Active
US6932867B2 Method for growing thin oxide films Chemistry; Metallurgy 5 Expired
US10208379B2 Synthesis and use of precursors for ALD of group VA element containing thin films Electricity 5 Active
US9175390B2 Synthesis and use of precursors for ALD of tellurium and selenium thin films Emerging Cross-Sectional Technologies 5 Active
US9382615B2 Vapor deposition of LiF thin films Chemistry; Metallurgy 5 Active
US11014866B2 Synthesis and use of precursors for vapor deposition of tungsten containing thin films Chemistry; Metallurgy 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.