Markku Leskelä
90Patents
16h-index
59Co-inventors
87Inventor score
Filing activity: Jul 16, 1992 → May 17, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10319588B2 | Method for depositing a metal chalcogenide on a substrate by cyclical deposition | Electricity | 398 | Active |
| US9223203B2 | Microcontact printed films as an activation layer for selective atomic layer deposition | Chemistry; Metallurgy | 322 | Active |
| US10731249B2 | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus | Electricity | 266 | Active |
| US6632279B1 | Method for growing thin oxide films | Chemistry; Metallurgy | 260 | Expired |
| US6416577B1 | Method for coating inner surfaces of equipment | Emerging Cross-Sectional Technologies | 260 | Expired |
| US6706115B2 | Method for preparing metal nitride thin films | Electricity | 100 | Expired |
| US6858546B2 | Method of depositing rare earth oxide thin films | Chemistry; Metallurgy | 87 | Expired |
| US6824816B2 | Process for producing metal thin films by ALD | Electricity | 87 | Expired |
| US7108747B1 | Method for growing oxide thin films containing barium and strontium | Chemistry; Metallurgy | 50 | Expired |
| US7498272B2 | Method of depositing rare earth oxide thin films | Chemistry; Metallurgy | 46 | Active |
| US6436232B1 | Procedure for adding a filler into a pulp based on cellulose fibers | Textiles; Paper | 36 | Expired |
| US6436238B1 | Process for preparing a paper web | Emerging Cross-Sectional Technologies | 31 | Expired |
| US7220451B2 | Process for producing metal thin films by ALD | Electricity | 27 | Expired |
| US6251222A | Filler for use in paper manufacture and procedure for producing a filler | Textiles; Paper | 25 | Expired |
| US6391154B1 | Paper web and a method for the production thereof | Textiles; Paper | 19 | Expired |
| US6599391B2 | Filler for use in paper manufacture and procedure for producing a filler | Textiles; Paper | 18 | Expired |
| US9315896B2 | Synthesis and use of precursors for ALD of group VA element containing thin films | Electricity | 14 | Active |
| US6406592B2 | Process for preparing base paper for fine paper | Textiles; Paper | 14 | Expired |
| US11047042B2 | Synthesis and use of precursors for ALD of molybdenum or tungsten containing thin films | Physics | 9 | Active |
| US10358407B2 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Chemistry; Metallurgy | 9 | Active |
| US6932867B2 | Method for growing thin oxide films | Chemistry; Metallurgy | 5 | Expired |
| US10208379B2 | Synthesis and use of precursors for ALD of group VA element containing thin films | Electricity | 5 | Active |
| US9175390B2 | Synthesis and use of precursors for ALD of tellurium and selenium thin films | Emerging Cross-Sectional Technologies | 5 | Active |
| US9382615B2 | Vapor deposition of LiF thin films | Chemistry; Metallurgy | 5 | Active |
| US11014866B2 | Synthesis and use of precursors for vapor deposition of tungsten containing thin films | Chemistry; Metallurgy | 5 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.