Martti Sonninen
1Patents
1h-index
6Co-inventors
25Inventor score
Filing activity: Sep 10, 2003 → Sep 10, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7141095B2 | Precursor material delivery system for atomic layer deposition | Emerging Cross-Sectional Technologies | 19 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.