Mathias Koch
3Patents
3h-index
5Co-inventors
36Inventor score
Filing activity: Aug 22, 2002 → Jun 29, 2004
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6695886B1 | Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool | Electricity | 18 | Expired |
| US6783630B2 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Electricity | 16 | Expired |
| US7166187B2 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Electricity | 9 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.