Michael D. Steiman
2Patents
1h-index
6Co-inventors
27Inventor score
Filing activity: Mar 30, 2001 → Dec 7, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6641470B1 | Apparatus for accurate endpoint detection in supported polishing pads | Performing Operations; Transporting | 22 | Expired |
| US6716093B2 | Low friction gimbaled substrate holder for CMP apparatus | Performing Operations; Transporting | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.