Michael L. Parodi
3Patents
3h-index
5Co-inventors
36Inventor score
Filing activity: Mar 29, 1995 → Apr 30, 1996
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5651823A | Clustered photolithography system | Emerging Cross-Sectional Technologies | 85 | Expired |
| US5766824A | Method and apparatus for curing photoresist | Electricity | 62 | Expired |
| US5798140A | Oscillatory chuck method and apparatus for coating flat substrates | Physics | 5 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.