Inventor · Oberkochen, DE

Michael Raum

1Patents
0h-index
7Co-inventors
19Inventor score

Filing activity: Apr 26, 2006 → Apr 26, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US8873151B2 Illumination system for a microlithgraphic exposure apparatus Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.