Minoru Onda
3Patents
2h-index
2Co-inventors
34Inventor score
Filing activity: Oct 6, 1998 → Oct 18, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6235438A | Projection exposure method and apparatus | Physics | 48 | Expired |
| US6522390B2 | Projection exposure method and apparatus | Physics | 21 | Expired |
| US9411247B2 | Exposure apparatus, exposure method, and method for producing device | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.