Naoko Tsugama
2Patents
2h-index
10Co-inventors
34Inventor score
Filing activity: Sep 21, 2015 → Mar 25, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10241418B2 | Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus | Electricity | 5 | Active |
| US10613445B2 | Methods and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process | Electricity | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.