Nuoya Yang
1Patents
0h-index
7Co-inventors
19Inventor score
Filing activity: Feb 12, 2020 → Feb 12, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12071689B2 | Trim and deposition profile control with multi-zone heated substrate support for multi-patterning processes | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.