Omar Serna
1Patents
1h-index
4Co-inventors
25Inventor score
Filing activity: Oct 2, 2000 → Oct 2, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6472326B1 | Reliable particle removal following a process chamber wet clean | Emerging Cross-Sectional Technologies | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.